Abstract
A new type of normally-closed gas microvalve is presented. The valve makes use of two micromachined SMA thin sheet devices, an active SMA device displaying the one-way shape memory effect and a passive superelastic SMA device, which maintains a normally-closed position. The outer diameter and height of the valve are 6 mm. Gas flow experiments in stationary equilibrium reveal a maximum flow of 470 standard ccm (sccm) at a pressure difference of 8000 hPa and a power consumption of 260 mW. The dynamics of heat transfer to and from the active microdevice is investigated by infrared microscopy and coupled FEM simulations. At 300 mW heating power, the heating time is about 1.2 s. Typical cooling times vary between 1.8 and 5 s depending on the gas flow.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: International Journal of Applied Electromagnetics and Mechanics
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
