Non-statistical Boltzmann solver for electron kinetics in gas discharges

Abstract

In this paper, we shall describe the use of two-dimensional electron Boltzmann solver for self-consistent modeling inductively coupled plasma (ICP). The emphasis will be placed on discussion on the advantages and disadvantages of the kinetic and total energy implementations from the numerical point of view. The second part of the paper will be devoted to simulations of kinetic phenomena in weakly collisional ICP. These phenomena are caused by anomalous skin effect and collisionless electron heating under conditions when the electron mean free path is comparable to the characteristic scale of spatial inhomogeneity of the electromagnetic fields. We shall describe peculiarities of the EDF formation under these conditions and compare results of our calculations with available experimental measurements of the EDFs in low pressure ICPs.