Abstract

It is shown that the impact of the electron distribution function (EDF) nonlocality on the spatial profiles of excitation rates is important up to high gas pressures pR<100 cmtorr. A paradoxical effect related to the nonlocal character of the EDF is revealed: the peaks of the profiles of the excitation rates shift from the discharge axis toward the periphery as the pressure increases. This effect cannot be understood from the hydrodynamic point-of-view but is instead related to the nonlocal character of the EDF

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