Abstract
Spatially resolved trace rare gases optical emission spectroscopy was used to analyze the electron energy-distribution function (EEDF) in low-pressure argon plasma columns sustained by surface waves. At frequencies >1 GHz, in the microwave-sustained region, the EEDF departs from a Maxwellian, characterized by a depletion of low-energy electrons and a high-energy tail, whereas in the field-free zone, the EEDF is Maxwellian. Abnormal behavior of the EEDF results from the acceleration of low-energy electrons due to the conversion of surface waves into volume plasmons at the resonance point where the plasma frequency equals the wave frequency and their absorption by either collisional or Landau damping.
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