Abstract
The study is on nonlocal conductivity and stochastic heating in low-pressure inductive discharges with cylindrical coils. The rf current density derived by solving the Boltzmann equation in cylindrical coordinates, with accounting for both the high-frequency heating field and the dc field in the discharge, is coupled with the wave equation resulting into the spatial distribution-under the conditions of anomalous skin-of the electromagnetic field components, of the rf current density and the power deposition in the free-fall regime of maintenance of hydrogen discharges.
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