Abstract
A three-fold symmetric SOI-MEMS gyroscope having parasitic softening nonlinearity from the drive comb and frequency tune fingers is successfully linearized through the use of shaped comb fingers that introduce a tuned cubic hardening compensation. The nonlinearity compensated gyroscope achieves high drive displacement (>10µm) while maintaining linear magnitude and phase frequency responses. The proposed tuning method also minimizes the amplitude-frequency (A-f) effects on the drive mode. Cancelling the drive nonlinearities leads to a better bias instability compared to the high displacement with nonlinear characteristics.
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