Nonlinear vibration control of nano-beam based on capacitive acoustic sensors

Abstract

The nonlinear vibration control of the Euler–Bernoulli beam is studied based on capacitive micro-mechanical acoustic sensors The graphene film has the characteristics of high sensitivity and high accuracy which can be applied to sense the vibration signal. Capacitive micro-mechanical acoustic sensors can be used to detect the acoustic signal of the vibration of the nano-beam. The nonlinear vibration control equation of nano-beam can be established with the displacement and velocity voltage feedback controller based on capacitive micro-mechanical acoustic sensors. The amplitude-frequency response equation of the primary resonance of nano-beam can be gotten by using the multiple scales method. The relationship between the nonlinear vibration of nano-beam and system parameters is investigated. The influencing factors of how to weak system nonlinearity and enhance system stability are analyzed. The static bifurcation behavior of the system is discussed. The numerical results show that the nonlinearity of vibration can be reduced and the stability of the system can be improved by selecting the appropriate control gains and appropriately reducing the amplitude of DC and AC excitation voltages.