Abstract
The anisotropy of the elastic properties of single-crystal silicon manifests itself in features of both the linear and nonlinear surface acoustic wave (SAW) propagation. Directions showing the phonon-focusing effect and strong nonlinearity were employed in contact-free and notch-free laser-based fracture experiments, yielding the intrinsic strength of silicon. The critical tensile stress values vary between 2.5 GPa and 7 GPa for the different crystallographic planes and directions of SAW propagation investigated.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
