Nonlinear stability analysis of piecewise actuated piezoelectric microstructures

Abstract

The main objective of this research is to provide a general nonlinear model of adjustable piezoelectric microwires with the ability to tune the stability conditions. In order to increase the controllability and improve system characteristics, only a part of the substrate is electrostatically actuated and the piezoelectric voltage is also applied. The governing equation of equilibrium (EOE) is derived from the principle of minimum total potential energy. The influences of the surface layer, size dependency, piezoelectricity, and dispersion forces are also included simultaneously. To solve the nonlinear differential equation, a numerical method is implemented and the obtained results are validated with available experimental and numerical results. Afterward, a set of parametric studies is carried out to examine the coupled effects of piezo-voltage, length/position of non-actuated pieces, nonlinear curvature, and molecular forces on the microresonators. It is found that the beam deflection and the pull-in voltage have sensitive-dependence on the system behavior. Furthermore, the beam deflection can increase or decrease with consideration of different positions of non-actuated pieces. This research is expected to fill a gap in the state of the art of the piezoelectric microstructures and present relevant results that are instrumental in the investigation of advanced actuated microdevices.