Abstract
In this paper, we propose a nonlinear position control using only position feedback to guarantee the tolerances for position tracking errors and yaw. In the proposed method, both mechanical and electrical dynamics are considered. The proposed method consists of the nonlinear position controller and nonlinear observer. The nonlinear position controller is designed by a backstepping procedure using the barrier Lyapunov function to satisfy the constraints of position error and yaw. The nonlinear observer is developed to estimate full state using only position feedback. The stability of the closed-loop system is proven using Lyapunov and input-to-state stabilities. Consequently, the proposed method satisfies the constraints of position error and yaw using only position feedback for the planar motor.
Highlights
A planar motor is a dual-axis linear motion motor that plays a significant role in semiconductor manufacturing systems and precision machine tools and in automated assemblies.A planar motor consists of four forcers that are symmetrically mounted on a puck, as shown in Figure 1 [1]
This planar motor has three degrees of freedom that consists of two translational degrees of freedom and an unwanted rotational degree of freedom due to the fact that not all forcers can be mounted at the center of mass
We propose a nonlinear position control using only position feedback under the position errors and yaw constraints for air-bearing planar motors
Summary
A planar motor is a dual-axis linear motion motor that plays a significant role in semiconductor manufacturing systems and precision machine tools and in automated assemblies. In Reference [8], a predictive position control method using trajectory gradient soft constraint with attenuation coefficients in the weighting matrix to achieve high-precision, time-varying, and long-stroke positioning was proposed for planar motors. These methods improved the position tracking performance; several drawbacks still exist. A robust adaptive control with the consideration of electrical dynamics was proposed for planar motors [16] The proposed method satisfies the constraints of position error and yaw using only position feedback for planar motors. The estimated state variables are used instead of the measured signals so that the measurement noise cannot affect the control performance
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