Nonlinear polarization responses of ZrO2-based thin films fabricated by chemical solution deposition

Abstract

The nonlinear polarization responses of ZrO2-based thin films were investigated. Y, Ce, Ti, and Sn were used as substitutes in ZrO2 thin films by chemical solution deposition. A pure ZrO2 film and the ZrO2 film with 1% Y substitution showed constricted polarization–electric field (P–E) curves. In contrast, the ZrO2 film with 5% Y substitution showed a linear P–E curve. The dielectric constants of the pure ZrO2 film and the ZrO2 film with 1% Y substitution increased by 7 and 11%, respectively, under an applied electric field of 2.5 MV/cm. The nonlinearity of the polarization responses was decreased by Ce substitution and Ti substitution. The ZrO2 films with Sn substitution showed narrow P–E curves. The dielectric constant of the ZrO2 film with 10% Sn substitution increased by 13% under an applied electric field of 3 MV/cm. These dielectric constant increases originate from electric-field-induced phase transitions of ZrO2-based thin films.