Nonlinear Optical Mapping of Cubic Silicon Carbide Micron Areas In Epitaxial Films of Hexagonal Polytypes

Abstract

AbstractVarious silicon carbide polytypes, such as 4H-, 6H- and 3C-SiC are clearly distinguished by the magnitude and rotational anisotropy of their optical second-harmonic (SH) response. The large dynamic range of the SH response of more than two orders of magnitude between these polytypes allows a fast and non-invasive mapping of 3C-SiC micron areas in 4H - and 6H-SiC epilayers. 3C-Microcrystallites of different oricutations are identified from SH rotational anisotropy scans.