Abstract

AbstractThis paper presents a systematic way of developing low order nonlinear models from physically- based, large scale finite element models of rapid thermal processing (RTP) systems. The low order model is extracted from transient results of the finite element model using the proper orthogonal decomposition (POD) method. Eigenfunctions obtained from the POD method are used as basis functions in spectral Galerkin expansions of partial differential equations solved by the finite element model to generate the reduced models. Simulation results demonstrate good agreement with steady state and transient data generated from the finite element model.

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