Nonlinear effects in collision cascades and high energy shock waves during ta-C:H growth

Abstract

The surface topography of hydrogenated tetrahedral amorphous carbon (ta-C:H) is critical for various applications such as microelectromechanical devices, magnetic and optical storage devices, and medical implants. The surface topography of ta-C:H films deposited by distributed electron cyclotron resonance plasma from C2H2 gas precursor was investigated. The effects of pressure, together with ion flux and energy, are studied by atomic force microscopy in relation to the structural evolution of the films. The results are compared with the predictions of the Edward-Wilkinson model [Proc. R. Soc. London, Ser. A 44, 1039 (1966)] recently proposed to account for ta-C:H growth and with previous interpretations based on hypersonic shock waves. The random hillocks observed on the smooth surfaces of ta-C:H films deposited at high pressure are thought to result from the interference of high energy shock waves triggered by C4Hx+ ions that produce overlapping collision cascades and induce nonlinear effects.