Non-linear dynamic analysis of the ultra-short micro gas journal bearing-rotor systems considering viscous friction effects

Abstract

Due to the micro-fabrication limitations and the low thickness of the silicon wafer, the length-to-diameter ratio (L/D) of the gas journal bearings in Power MEMS is about one order lower than that of the conventional bearings, which suggests that the viscous friction force in the micro-bearing is comparable to the load capacity. The effects of viscous friction force on non-linear dynamic characteristics of the ultra-short micro-bearing-rotor system are studied in this paper. The molecular gas-film lubrication model, which valid for arbitrary Knudsen numbers, is systematically coupled with the rotor kinetic equations and solved simultaneously to investigate the non-linear dynamic behavior of the system. The center orbits, phase portraits, Poincare maps, and FFT spectra of the system response at different L/D ratio, rotor mass, and bearing number, and the corresponding bifurcation diagrams for cases of ignoring and considering viscous friction force are inspected and compared. The results indicate that, if the viscous friction force is not taken into account in the case of low L/D ratio, the low-frequency large-amplitude self-excited whirl motion will be predicted as the increase of the rotor mass and the bearing number. However, when the viscous friction force is included in the non-linear dynamic model, the rotor motion becomes more stable under the same conditions, as the synchronous motion with smaller amplitude prevails.