Noninvasive thickness measurements of metal films through microwave dielectric resonators

Abstract

Thicknesses of Pt films ranging from 60 to 950 nm are measured noninvasively using a TE011-mode dielectric resonator with the resonant frequency of 8.5 - 9.8 GHz at temperatures of 77 K and 293 K. A cylindrical rutile rod is used as the dielectric, with a high-TC superconductive YBa2Cu3O7−δ film used as the bottom endplate of the resonator for measurements at 77 K. This method is based on two facts: i) Due to the electromagnetic interferences of incoming and reflected waves at the surface of the metal film surface, the effective surface resistance varies with the film thickness, and ii) the intrinsic surface resistance of normal metals is equal to the intrinsic surface reactance in the local limit. The measured thicknesses using the rutile resonator appear to be comparable with those obtained using a profilometer.