Abstract
Double-crystal rocking curves for an InP/InGaAsP/InP double heterostructure grown by hydride vapor phase epitaxy have been obtained which reveal fringes corresponding to both the top InP layer and to the buried InGaAsP layer thickness. Fourier transform spectra of the rocking curves are shown to be very useful in extracting the thicknesses. We believe this to be the first report of a measurement of the thickness of a buried layer using only x-ray fringe spacings.
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