Abstract
In this paper, nondestructive microwave scanning techniques have been used to image the local microwave properties of planar microwave devices. A coaxial cavity, together with a niobium tip, has been used as a probe in the scanning microwave near-field microscope. Quantitative images of the dielectric constant of the substrates as well as the variations of the surface resistance of the line patterns in the metal multilayers have been obtained. Local surface resistances at 3GHz have been measured on microwave devices prepared with laser ablated YBaCuO thin films, which helps in evaluating the performance of the devices.
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