Abstract
The measurement principle for detecting surface and sub-surface defects in solid materials by the optical beam deflection method (OBD) is described. The detectable depth of sub-surface defects is predicted through calculating the dependence of the surface temperature distribution of a solid sample, typically metal Al, on the thickness of the solid material and modulation frequencies of a pump laser. The defects in surface and sub-surface of some samples such as carbon film coated on glass, C/C composite material and metallic Al, etc., experimentally detected and directly displayed by grey image or 3D image.
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