Abstract
Abstract Materials research, biomedical research, and semiconductor manufacturing can all benefit from nondestructive, high-resolution methods of analysis. As most materials are heterogeneous, it is important to not only acquire high resolution topographic information, but also to identify the chemical composition of samples. A combination of high resolution microscopy with chemically sensitive spectroscopy combined in one instrument allows the detailed characterization of samples with different analytical techniques. When individual instruments are used, returning to a previously surveyed sample area can be very time consuming if not impossible without surface markers.
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