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Abstract
This work investigates the polarization behavior of low-temperature cofired ceramic (LTCC)/PZT sensor-actuator-modules fabricated by packaging of ceramic PZT plates between alumosilicate-corundum LTCC green layers and subsequent sintering at elevated temperatures. Polarization evaluation was done by applying the laser intensity modulation method (LIMM) where a thermal wave travelling into the ferroelectric PZT ceramic plate is generated by an intensity-modulated laser beam. The penetration depth of the thermal wave was varied with the modulation frequency allowing the separation of pyroelectric response contributions at different regions from the surface to the frequency-dependent penetration depth of the thermal wave.
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