Abstract
In this work, low-temperature photoluminescence (PL) is used for the investigation of beryllium (Be) dopant outdiffusion in AlGaAs/GaAs single-heterojunction bipolar transistors (HBTs). Near the typical emission peak at ∼1.92 eV which is due to the band-to-band transition from AlGaAs emitter, an additional emission peak is found in the PL spectrum. This peak is found to be caused by the Be-related transition from AlGaAs emitter due to the Be outdiffusion from the GaAs base to the AlGaAs emitter. The concentration of Be outdiffused into the emitter can be estimated from the energy separation between these two emission peaks in AlGaAs range based on the band gap narrowing effect. The measured dc current gain and the emitter-base turn-on voltage of the HBTs fabricated on different wafers with different growth conditions were found to correlate well with the PL results. Our results demonstrate that low temperature PL technique is an efficient method in identifying Be outdiffusion in HBTs and is useful in HBT growth and device structure optimization.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
