Abstract
A dual-beam Michelson interferometer has been built with two thin-film specimens configured as end mirrors. The two specimens have been prepared by coating a 10 nm thick titanium film on a silicon substrate and coating a 100 nm thick platinum over the titanium film. For one of the specimens, the silicon surface has been treated prior to the coating (the treated specimen). Each specimen is oscillated from the rear surface of the substrate with an acoustic transducer at a driving frequency ranging from 6 to 14 kHz, and the resultant film surface displacement is measured with the interferometer. The dual-beam configuration is important to compare the treated and untreated specimens under the same experimental conditions. The oscillation amplitude of the transducer’s surface has been calibrated so that the specimens can be oscillated with the same acoustic amplitude for the entire frequency range. The study has confirmed our previous observation that the film-substrate interface of the treated specimen shows a resonance-like behavior near 8 kHz, exhibiting higher oscillatory displacement than the untreated specimen.
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