Abstract
Electromagnetic–acoustic transduction represents an alternative to piezoelectric transduction with unique properties and advantages for resonator sensors. We have shown that such devices are suitable as mass microbalances similar to quartz crystal resonators, and as liquid density and viscosity sensors by exciting a suitable in-plane mode featuring dominant shear vibration. Generating out-of-plane vibrations we have applied these devices also as liquid level sensors. In contrast to classic time-of-flight ultrasonic liquid level sensors, the resolution is not limited by the wavelength, since small frequency changes due to interference effects with a standing acoustic wave are evaluated. For this contribution we have extensively evaluated this liquid level sensing and will present and compare new measurement and modeling results. The model comprises electromagnetic–acoustic interaction with a lossy transmission line representing the acoustic wave in the liquid. In impedance measurements with standard lab equipment a resolution as low as 3 µm at a liquid level of 10 mm and an operating frequency of 275 kHz has been achieved.
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