Abstract
The paper is devoted to the development of noncontact acoustic method of the determination of thin film conductance by using shear-horizontal zero order (SH0) acoustic waves in thin piezoelectric plates. The method is based on the registration of changes in velocity and attenuation of acoustic waves in a piezoelectric plate due to placing the structure “film under study–dielectric substrate” on the certain distance from the plate. The limits of measured values by the suggested method are determined. The theoretical data are compared with the experimental results.
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