Abstract
3He and 10B implantation profiles in several polymers are examined by means of a NRA technique with thermal neutrons. 200 keV 10B ions were implanted into different kinds of polymers. In all the cases, it is found that the resulting depth profiles have a nonregular shape. A fraction which depends on the target material distributes along a tail directed towards the surface. Due to the nonregularity of the depth profiles, we present only the most probable ranges and the full width half maxima of the distributions. These results are compared with the Ziegler, Biersack and Littmark prediction. On the other hand, 3He implanted into Mylar is found to be mobile at room temperature, as after ten days no trace of the implanted material is found in the substrate.
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