Abstract
This paper presents a low-cost non-invasive millimeter-wave surface-height measurement sensor of dielectric and polymer films on glass and quartz substrates. The surface-height profiler utilizes near-field resonance measurement technique operating at 96 GHz implemented by using a single complementary split-ring resonator (CSRR) integrated with a tailor-made WR10 rectangular waveguide. By placing a glass or quartz substrate uniformly coated with SU-8 photoresist on top of the CSRR, the thickness of the SU-8 polymer can be extracted based on the reflected and transmitted electromagnetic-wave energy interacting at the electrical boundary between the substrate and polymer film. Uniform single layers of SU-8 polymer with thicknesses from 3 to $13~\mu \text{m}$ coated on top of the glass substrate are measured and characterized. The extracted polymer-film thicknesses from the sensor in this paper show an agreement of higher than 95% as compared with the commercial surface profiler instrument, while offering various advantages, such as non-invasion, ease of measurement setup, low-cost, and miniaturization.
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