Abstract
Spatial resolution of scanning electron microscopy (SEM) and electron-based material degradation of organosilicate glass thin films are systematically studied using low voltage SEM imaging. In order to investigate the presence of shrinkage in this paper, the primary beam voltage $({\rm{E}_{\mathrm{ p}}})$ and the working distance are optimized in combination with the use of the energy selective backscattered electron detector. Results obtained with backscattered electron imaging at low incident energies are discussed and compared to standard working conditions in the SEM.
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