Non-Destructive Depth Profiling by XPS Peak Shape Analysis

Abstract

It is well known that the usual procedure for quantification by electron spectroscopy that is based on measured peak intensities is highly unreliable. An improved method is to take into account that the peak shape in a wide energy range, on the low kinetic energy side of the peak varies considerably with the surface morphology on the nano-meter depth scale. This observation has in recent years been applied in the formulation of a by now well known method for quantification that is based on quantitative analysis of measured peak shapes. The technique is sensitive on the 1 - 10 nm depth scale and it is non-destructive. The method suggested for the extraction of quantitative information from the large variation of the inelastic background with atom depth distribution will be reviewed briefly here. An example of practical application of the technique is also shown.