Abstract
SummaryAn overview of the main methods for mathematical modeling of the working process of non‐contact vacuum pumps is given. The specifics and the main stages of mathematical model development for screw, scroll, claw and Roots vacuum pumps are considered. The results of mathematical modeling of pump characteristics are presented and compared with experimental data. The mathematical modeling technique presented here can be recommended for analyzing the influence of pump geometry and operating conditions on the pump characteristics of non‐contact oil‐free vacuum pumps.
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