Non-contact current measurement with cobalt-coated microcantilevers

Abstract

A magnetic field detection system that uses a cobalt-coated microcantilever as the detector element is demonstrated. Three different microcantilever geometries are investigated. This research also demonstrates a novel microcantilever readout technique using a dual fiber optical readout. The cantilever sensors are shown to detect changes in current as small as 0.1 A and the ability to measures current up to 5 mm from the sensor.