Abstract
Series arrays of 50 gradiometer superconducting quantum interference devices (SQUIDS) and 100 magnetometer SQUIDs have been fabricated using Nb/AlO/sub x//Nb junctions with a planarized all-refractory technology for superconductivity (PARTS), the white noise of these arrays has been measured. The individual devices are 50-pH, 2-hole and 100-pH, 1-hole SQUIDs with integrated single turn input coils, 1- mu m/sup 2/ and 0.5- mu m/sup 2/ junctions, and PtRh shunt resistors. The input coil inductance of 10 nH will effectively match with a wide bandwidth to miniature pick-up loop structures for various experiments. Ideally, the coupled energy sensitivity should remain constant as devices are added in series, while the output impedance rises to a level practical for direct coupling to room-temperature electronics. The output impedance of the arrays is 250-1000 Omega . The white noise was measured directly with an ultra low noise preamplifier at room temperature. The best result was Phi /sub N/=0.12 mu Phi /sub 0// square root Hz with a corresponding coupled energy sensitivity of 56 h. >
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