Abstract
We have performed magnetotransport and noise characterization studies of ultrasensitive anomalous Hall effect (AHE) sensors based on the Ta/Co40Fe40B20/MgO multilayer structure. The magnetization is near spin reorientation transition. This greatly reduces the saturation field with improvement of the magnetic sensing performance. We have performed temperature-dependent measurements to investigate the effect of tunable magnetic anisotropy. Both 1/f noise and sensitivity have a strong temperature dependence. Moreover, the scaling relations between 1/f noise and sensitivity change dramatically as temperature changes, showing different noise originations depending on magnetic anisotropies. With a small sensing area of 20×20 μm2, the best magnetic field detectability reaches 76 nT/Hz at 1 Hz and 2 nT/Hz at 10 kHz. AHE sensors with compensated magnetic anisotropies are, thus, suitable for ultrasensitive magnetic field sensing applications.
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