Abstract
The structure of nodular defects in thin CoCr films on silicon substrates was studied using plane-view and cross-sectional transmission electron microscopy. Cross-sectional transmission electron micrographs reveal the habit as well as the morphology of the nodular defects. They consist of conically shaped close-packed h.c.p. crystallites with an open or low-density boundary to the surrounding film which consists of well formed columnar h.c.p. crystallites.
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