Abstract

In this paper, we investigated the nitrogen oxides (NO, NO2) detection capability of strontium titanate (SrTiO3) when used as sensing layer on gas sensitive silicon carbide field effect transistors (SiC-FETs). Sensitivity, selectivity and response times for NO, NO2, and NH3 were characterized, to determine the possibility for diesel exhaust after treatment control applications. It was found that NOx can be detected down to single digit ppm levels at sensor temperatures in the 550°C - 600°C range. In addition, the results indicate that it is possible to suppress sensitivity to ammonia by selecting an operating temperature around 530°C.

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