Abstract
In this work, the fabrication of single titanium oxide nanodot (ND) resistive sensors for NO gas sensing at room temperature is reported. Two atomic force microscopy nanolithography methods, nanomachining and nano-oxidation, are employed. A single titanium nanowire (NW) is created first along with contact electrodes and a single titanium oxide ND is subsequently produced in the NW. Gas sensing is realized by the photo-activation and the photo-recovery approaches. It is found that a sensor with a smaller ND has better performance than a larger one. A response of 31%, a response time of 91 s, and a recovery time of 184 s have been achieved at a concentration of 10 ppm for a ND with a size of around 80 nm. The present work demonstrates the potential application of single metal oxide NDs for gas sensing with a performance that is comparable with that of metal oxide nanowire gas sensors.
Highlights
In recent years, gas sensors have been widely used in a variety of fields, such as medical diagnosis [1,2], environmental monitoring [3] and combustion emission control [4]
Single titanium oxide ND sensors are realized by atomic force microscopy (AFM) nanolithography and used for NO gas sensing
A Ti NW is generated first by AFM nanomachining and a titanium oxide ND is produced in the NW by AFM nano-oxidation
Summary
Gas sensors have been widely used in a variety of fields, such as medical diagnosis [1,2], environmental monitoring [3] and combustion emission control [4]. (The exposure times in Figure 3b are 155, 230 and 315 s, respectively.) It is clear that the current decrease becomes larger as the concentration rises, because more molecules adsorb on the surface.
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