Abstract
Electronics was the most important technological revolution in the 20th century. Then, micro-/nano-electronics was the 2nd revolution. Miniaturization of electron devices by micro-/nano-electronics, dramatically improved the performance, reliability, cost, energy consumption, volume, and weight of the electric system by the order of trillion times. Thus, without the micro-/nano-electronics, today’s smart society with internet, artificial intelligence, etc. cannot not exist. The development of micro-/nano electronics has been driven by the progress of LSI technology. In this paper, early history of NMOS LSI development is described based on my experience at Toshiba.
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