Abstract
TiO2 nanoparticles and nitrogen‐doped TiO2−xNx nanoparticles dispersed in plasma polymer phase are produced by atmospheric pressure DBD in titanium tetraisopropoxide with dry air, mixture of N2 and O2, and 100% N2 used as carrier gases. Energy supply per monomer molecule (the Yasuda parameter) is found to be an important parameter describing the deposition process in N2. In the monomer deficient regime, spherical TiO2 particles are produced with an average size varying from 30 to 80 nm. In the power deficient regime, composite films are deposited consisting of TiO2−xNx nanoparticles embedded in nitrogen‐rich plasma polymer matrix, particulates being larger than 100 nm.
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