Abstract
The nitriding of titanium in nitrogen and nitrogen-hydrogen plasmas prepared using a microwave discharge was studied. Power was supplied from a magnetron to the discharge tube through a rectangular wave guide. The specimens placed in the discharge tube were nitrided in the discharge region and in afterglow region. The nitriding products in the discharge region were similar to those in an r.f. discharge reported previously. In the afterglow region, nitriding proceeded even at 50 °C and it was promoted by increasing the temperature. The effects of active nitrogen in the afterglow region are briefly discussed in the light of the results of plasma diagnostics and surface analysis.
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