Abstract
Thermal nitridation of the Si(111)-(7 × 7) reconstructed surface with ammonia has been investigated using scanning tunneling microscopy (STM). True nitride formation in the form of ring-like structures as in stoichiometric silicon nitride (Si 3N 4) was observed at imperfections on the surface, which otherwise preserved the characteristics of the (7 × 7) reconstruction. However, the ratio of reacted adatoms in the reconstruction never exceeded ∼ 50%, indicative of a frustrated saturation behavior for the adatom dangling bonds in the Si(111)-(7 × 7)-NH 3 reaction system.
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