Abstract

Abstract A description is given of data resources that are available from the National Institute of Standards and Technology (NIST) for X-ray photoelectron spectroscopy (XPS) and Auger-electron spectroscopy. NIST currently has three databases available: an XPS Database, an Electron Elastic-Scattering Cross-Section Database, and an Electron Inelastic-Mean-Free-Path Database. NIST also offers Standard Test Data (STD) for XPS, a set of simulated XPS data designed to evaluate algorithms and procedures for detecting, locating, and measuring the intensities of overlapping peaks in a doublet. The XPS database and the XPS-STD are available over the internet.

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