Abstract
This paper studied the gas sensitivity of a NiO-In2O3 composite thin film/tin-diffused glass optical waveguide sensor. The sensitive element was synthesized by a sol-gel method. The sensor was fabricated by coating a tin-doped glass optical waveguide with a NiO-In2O3 thin film. The optical waveguide sensor was fixed onto a gas sensor system to detect gaseous volatile organic compounds (VOCs). The sensor showed high sensitivity towards xylene gas at room temperature; it responded significantly to 1×10-7 (volume ratio) of xylene vapor and the response and recovery times were short (less than 3 and 26 s, respectively). The relative standard deviation of the output light intensity was 18%±1%.
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