Abstract
The paper presents a CMOS-compatible process to implement NiFe-anodic alumina oxide (AAO) nanocomposite material as a magnetic core for on-chip spiral inductor fabrication. The NiFe nanorod array with ∼70 nm in diameter and an aspect ratio of ∼14 is electroplated using Ti as a conductive layer in an anodic alumina oxide (AAO) template on a silicon substrate. Experimental results show that the spiral inductor using a NiFe-AAO nanocomposite magnetic core can have more than 25% inductance enhancement without any Q degradation to GHz range.
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