Nickel stamp origination from generic SU-8 nanostructure arrays patterned with improved thermal development and reshaping

Abstract

In this study, we show that rapid, reliable, and scalable custom-input colour patterning and eye-readable data storage can be achieved through high-throughput nanoimprinting-exposure-thermal-treatment (NETT) and thermal development and reshaping (TDR) techniques. The main impediment for commercial realization of high-resolution metasurfaces using NETT and TDR is the cost and speed of stamp origination as well as the quality and durability of the fabricated stamp. In order to accelerate the patterning process, lower the fabrication costs, and obtain patterns with high-resolution, we introduce and optimize a new method for origination of durable Ni stamps by electroplating on an SU-8 master fabricated according to custom-input colour patterns via NETT and TDR. In these processes, laser exposure is used to locally activate the generic RGB pixels fabricated on SU-8 via thermal nanoimprint lithography (NIL), according to the custom design. Upon TDR treatment, the exposed regions crosslink while the unexposed areas flatten. TDR is optimized to find the fastest processing condition that results in minimum nanocone height reduction and maximum diffraction efficiency. AFM results show that the TDR-processed nanocones in all red, green, and blue subpixels witness minimal shrinkage in comparison with the corresponding as-imprinted RGB pixels. Among three different sets of direct baking and ramping temperature TDR experiments, direct 55 °C-10 min TDR is found to be the optimal recipe. As a proof-of-concept, the originated stamp was employed to replicate colour images on PET and glass substrates using UV-thermal NIL. The reproduced colour image, photographed at pre-defined lighting and viewing angles, bears vivid diffractive colours with different RGB ratios that are in good match with the custom-input image. Furthermore, the red, green, and blue diffraction peaks from the TDR-55 °C-baked sample exhibit either trivial or no distinguishable difference as compared to the corresponding peaks in the as-imprinted sample.