Nickel-chromium interface resolution in Auger depth profiles

Abstract

Auger depth resolutions for fine-grained crystalline Ni/Cr multilayers have been determined. Resolution is shown to be a function of ion species, ion energy, ion incident angle, and the presence of reactive species. Deterioration of interface resolution with depth is shown to be the result of cumulative surface roughness induced by the ion beam to an extent proportional to the ion velocity normal to the surface. The presence of a reactive species to create an amorphous surface layer is shown to inhibit the development of surface roughness. The best resolution was obtained using low energy Xe ions and large ion beam angles. The ultimate resolution is limited by the fabrication perfection of the standard, and not by the sputtering process or by the Auger mean free path length.