Abstract

Nichrome thin film technology and its application

Highlights

  • NiCr thin film resistors are widely used in the current resistor technology

  • High stability of electrical properties. This behaviour led to wide application of these alloys as resistive material for wire wound resistors. 1,1

  • The knowledge about the favorable properties of Ni-Cr alloys for electrical applications obviously initiated intense work to deposit them by vacuum techniques in form of thin films, at first surely not fully understanding and appreciating the additional electrical advantages of vacuum deposited thin films, such as higher resistivity and lower temperature coefficient of resistance (TCR)

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Summary

INTRODUCTION

Should consider: One of the characteristics of the transition metal alloys is their interesting behaviour concerning applications as resistive material: Comparative high resistivity. This behaviour led to wide application of these alloys (sometimes alloyed with Fe, A1, Cu) as resistive material for wire wound resistors. Discussing the behaviour of thin NiCr films we a) The behaviour of a "real" resistor is determined by the performance and reliability of the resistive material itself; rather the properties of the resistors include the influence of the terminations, the interconnections, the substrate, layout design, sealing, environment, etc. We will discuss some selected and characteristic aspects of NiCr technology with respect to production, performance and reliability

A Evacuation B Evaporation NiCr
Thermal aging and film structure
Substrates
TERMINATIONS AND CONDUCTOR MATERIALS
A Laser Trimmed B
Findings
APPLICATIONS
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