Abstract
Ni-Zn-Co ferrite films (Ni/sub 0.16-0.21/Zn/sub 0.30-0.36/Co/sub x/ Fe/sub 2.38-2.46/O/sub 4/, x=0/spl sim/0.16) were deposited by spin-spray ferrite plating method at low temperature of 90/spl deg/C. All the films had a saturation magnetization M/sub s/ larger than 440 emu/cc. A small amount of Co substitution x into Ni-Zn ferrite films changed the magnetic anisotropy in film plane from isotropic to anisotropic and the magnetic easy axis was parallel to the flowing direction of the sprayed solutions on the rotating substrate. The coercivity H/sub c/ and anisotropy field H/sub k/ took small values of 10 and 25 Oe at x=0.03. The complex permeability was measured in the range 20 MHz-3 GHz and very high static permeability /spl mu/' of 120 and resonance frequency f/sub r/ of 900 MHz were achieved at x=0.03. Exhibiting large /spl mu/">30 even at 3 GHz, this Ni-Zn-Co ferrite film is applicable for wave absorbers to suppress the electro-magnetic interference among devices up to microwave frequencies.
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