Abstract
An 80nm-thick ZnO film was prepared via the sol–gel method at 500°C using zinc acetate, 2-methoxyethanol, and monoethanolamine as precursors. Characterization of the film showed that it was composed of 20–30nm sintered ZnO nanoparticles with good crystallinity. The NH3 sensing properties of gas-sensing devices with a 5μm gap that utilized the prepared ZnO film were examined. The highest sensor response (57.5%) was achieved with 600ppm NH3 in air at 150°C. The response and recovery times were 160s and 660s, respectively. This study also examined the effects of NH3 and oxygen concentration as well as the temperature on the sensor response performance. The findings show that oxygen plays an important role in the conductivity of ZnO thin films, and thus affects the sensor response toward NH3.
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