Abstract
The advent of rapid, cost-effective, high-powered lasers are driving forward advancements in the fields of for soft X-ray and EUV imaging, ptychography, spectroscopy and tomography. This coupled with increasing investment in industrial EUV lithography and semiconductor metrology processes is creating demand for fast, high resolution and sensitive detectors in the 20 eV to 10 keV range. Here we present the latest detector developments in the field of sCMOS for direct EUV and soft X-ray detection. We demonstrate how sCMOS technology is able to overcome the limitations of slow scan CCD technology to provide high resolution direct EUV and soft X-ray detection with a greater than 16-fold speed increase whilst maintaining low noise compared to classical CCD detectors.
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