Next generation dilatometer for highest accuracy thermal expansion measurement of ZERODUR®

Abstract

In the recent years, the ever tighter tolerance for the Coefficient of thermal expansion (CTE) of IC Lithography component materials is requesting significant progress in the metrology accuracy to determine this property as requested. ZERODUR® is known for its extremely low CTE between 0°C to 50°C. The current measurement of the thermal expansion coefficient is done using push rod dilatometer measurement systems developed at SCHOTT. In recent years measurements have been published showing the excellent CTE homogeneity of ZERODUR® in the one-digit ppb/K range using these systems. The verifiable homogeneity was limited by the CTE(0°C, 50°C) measurement repeatability in the range of ± 1.2 ppb/K of the current improved push rod dilatometer setup using an optical interferometer as detector instead of an inductive coil. With ZERODUR® TAILORED, SCHOTT introduced a low thermal expansion material grade that can be adapted to individual customer application temperature profiles. The basis for this product is a model that has been developed in 2010 for better understanding of the thermal expansion behavior under given temperature versus time conditions. The CTE behavior predicted by the model has proven to be in very good alignment with the data determined in the thermal expansions measurements. The measurements to determine the data feeding the model require a dilatometer setup with excellent stability and accuracy for long measurement times of several days. In the past few years SCHOTT spent a lot of effort to drive a dilatometer measurement technology based on the push rod setup to its limit, to fulfill the continuously demand for higher CTE accuracy and deeper material knowledge of ZERODUR®. This paper reports on the status of the dilatometer technology development at SCHOTT.